Angeline Chung
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129553N (2024) https://doi.org/10.1117/12.3012681
KEYWORDS: Metrology, Scanning electron microscopy, Contour extraction, Machine learning, Optical proximity correction, Image processing, Electronic design automation, Design

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