Anne-Laure Deman
at Ecole Centrale de Lyon
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 August 2013 Paper
A.-L. Deman, M. Erouel, D. Lallemand, M. Phaner-Goutorbe, P. Lang, J. Tardy
Proceedings Volume 5940, 59400E (2013) https://doi.org/10.1117/12.614968
KEYWORDS: Tantalum, Dielectrics, Polymethylmethacrylate, Field effect transistors, Oxides, Polymers, Atomic force microscopy, Thin films, Interfaces, Transistors

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