Dr. Annika Schmitt
at optiX fab GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 30 April 2023 Presentation
Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Philipp Naujok, Klara Stallhofer, Tina Seifert, Annika Schmitt
Proceedings Volume PC12494, PC124940A (2023) https://doi.org/10.1117/12.2664589
KEYWORDS: Extreme ultraviolet, Multilayers, EUV optics, Semiconductors, Semiconducting wafers, Printing, Photons, Industry, Extreme ultraviolet lithography, Coating

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