An innovative holographic imaging technique is applied in characterization of MEMS switch non-linear dynamics. The Duffing's non-linear oscillator based phenomenological model was adopted to study MEMS switch non-linear response due to the complicated contact phenomena and corresponding boundary conditions. An experimental contact measurement result of MEMS cantilever response that matches theoretical trends is provided. Non-destructive contact measurements were performed by means of quantitative nanomechnical test instruments. Non-contact holographic characterization method yielded results comparable with phenomenological model and contact measurements. The proposed holographic characterization method consists of digitized holographic measurements enhanced by the FEM
eigenvector problem solution. Two cases were analyzed for simple and perturbated sinusoidal excitations that correspond to the free and contact boundary conditions, respectively.
KEYWORDS: Sensors, Nondestructive evaluation, Acoustics, Polymers, Data modeling, System identification, Actuators, Ultrasonics, Chemical elements, Signal processing
A nondestructive identification system for diagnostics of rubberlike materials has been developed. The system is based on the simultaneous contact impedance and compliance test conducted at two different sampling frequencies which correspond to the dynamic and quasistatic loadings, respectively. Measurements are taken by a piezoactive contact impedance tester which is a standing wave device registering the leakage of acoustic flow from the actuator via indenter into loaded specimens. Lame's elastic constants, density and rheological parameters of specimen are well correlated with a change in the output signal obtained from the sensor. Experimental data are processed by means of digital filtering, autoscaling and polynomial fitting. The LP filtered data, which correspond to the transient period of loading, are fitted with the dynamic model consisting of several Voigt's elements connected in series. Furthermore, the non-filtered data sampled at high frequency, which correspond to the quasistatic loading, are compared with the database.
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