Aris W. W. Chen
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 December 2008 Paper
Aris Chen, Victor Huang, Sophie Chen, C. J. Tsai, Kenneth Wu, Haiping Zhang, Kevin Sun, Jason Saito, Henry Chen, Debbie Hu, Ming Li, William Shen, Uday Mahajan
Proceedings Volume 7140, 71400W (2008) https://doi.org/10.1117/12.804558
KEYWORDS: Semiconducting wafers, Inspection, Particles, Light scattering, Coating, Polishing, Scattering, Scanning electron microscopy, Crystals, Defect inspection

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