Mechanical displacement is one of the mechanisms that can be utilized for realizing tunable optical metasurfaces. We propose nano-electromechanically tunable metasurfaces based on slot mode resonances at telecom wavelength. Utilizing high aspect ratio silicon slabs that can bend towards each other on a substrate, we achieve a robust device that can cover large areas. Upon applying 40 V, the device can achieve 4 nm spectral shift which gives rise to a 70% amplitude modulation. At the cost of a higher power consumption, the proposed device is mechanically robust and can be used in beam steering, modulation and wavefront shaping.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.