Mr. Binbin Yan Profile

Binbin Yan

at Beijing Superstring Academy of Memory Technology

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 28 April 2023 Poster + Paper

Liang Li, Miao Jiang, Di Liang, Binbin Yan, Mingqi Gao, Dajun Wu, Andy Lan, Jiangliu Shi

Proceedings Volume 12494, 1249413 (2023) https://doi.org/10.1117/12.2657844

KEYWORDS: Tolerancing, Semiconducting wafers, Simulations, Reticles, Phase shifts, Etching, Resolution enhancement technologies, Quartz

Proceedings Article | 27 April 2023 Poster + Paper

Binbin Yan, Miao Jiang, Futian Wang, Di Liang, Liang Li, Wei Feng, Joer Huang, Dajun Wu, Andy Lan, Jiangliu Shi

Proceedings Volume 12496, 124962K (2023) https://doi.org/10.1117/12.2657841

KEYWORDS: Optical alignment, Overlay metrology, Automation, Metrology

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