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Benjamin Bernard
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Publications (2)
Proceedings Article | 5 March 2021 Presentation + Paper
Optimized temporal energy deposition for advanced processing of Si and SiC based on highly flexible TruMicro series 2000
Marc Sailer, Florian Jansen, Axel Fehrenbacher, Aleksander Budnicki, Chuong Tan, Dirk Sutter, Ulf Quentin, Jonathan Bauch, Benjamin Bernard
Proceedings Volume 11673, 116730A (2021) https://doi.org/10.1117/12.2577590
KEYWORDS: Silicon carbide, Solar energy, Silicon, Electronic components, Semiconductors, Pulsed laser operation, Micromachining, Wind energy, Ultrafast phenomena, Ultrafast lasers
Proceedings Article | 24 April 2020 Paper
Stress analysis of Si chip sidewalls using micro-Raman spectroscopy
M. De Biasio, M. Kraft, R. Ong, C. Seifert, M. Ossiander, B. Bernard, M. Roesner
Proceedings Volume 11390, 1139015 (2020) https://doi.org/10.1117/12.2557033
KEYWORDS: Raman spectroscopy, Silicon, Laser processing, Stress analysis, Micro raman spectroscopy, Semiconductor lasers, Microscopes, Calibration, Semiconducting wafers
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