Dr. Bernd Thallner Profile

Dr. Bernd Thallner

at EV Group

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 25 May 2022 Presentation + Paper

B. Matuskova Lednicka, T. Uhrmann, B. Považay, R. Holly, F. Bögelsack, T. Zenger, B. Thallner, J. Nakanishi, T. Nishimura

Proceedings Volume 12054, 120540B (2022) https://doi.org/10.1117/12.2608176

KEYWORDS: Scanning electron microscopy, Optical lithography, Electroplating, Packaging, Maskless lithography

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Keywords/Phrases