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Caijing Cheng
at Luoyang Electro-optical Equipment Research Institute of AVIC
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Publications (4)
Proceedings Article | 20 November 2014 Paper
Study on inductively coupled plasma etching induced damage of InSb
Liwen Wang, Junjie Si, Guodong Zhang, Caijing Cheng, Dongfeng Geng
Proceedings Volume 9300, 93001F (2014) https://doi.org/10.1117/12.2071936
KEYWORDS: Etching, Capacitance, Semiconductors, Wet etching, Sensors, Plasma etching, Anisotropic etching, Infrared sensors, Capacitors, Metals
Proceedings Article | 23 October 2012 Paper
Thermal annealing effect on the electrical properties of the Pt/Al0.45Ga0.55N Schottky contacts
Caijing Cheng, Junjie Si
Proceedings Volume 8419, 84190N (2012) https://doi.org/10.1117/12.975823
KEYWORDS: Annealing, Resistance, Thermal effects, Temperature metrology, Platinum, Nitrogen, Photodiodes, Gallium, Interfaces, Silicon
Proceedings Article | 5 August 2009 Paper
Method for fabricating Au-Al0.30Ga0.70N lateral Schottky photodiode
Caijing Cheng, Zhengxiong Lu, Ian Zhao, Jiaxin Ding, Junjie Si, Weiguo Sun
Proceedings Volume 7383, 73831X (2009) https://doi.org/10.1117/12.834560
KEYWORDS: Diodes, Photodiodes, Resistance, Electrical breakdown, Reflection, Crystals, Remote sensing, Sensors, X-ray diffraction, Ultraviolet radiation
Proceedings Article | 8 January 2008 Paper
Study on annealed Pt/n-AlxGa1-xN MSM UV photodetectors
Xiangfeng Zhang, Weiguo Sun, Zhengxiong Lu, Caijing Cheng, Hongyan Zhao
Proceedings Volume 6838, 68381S (2008) https://doi.org/10.1117/12.756558
KEYWORDS: Annealing, Platinum, Photodetectors, Ultraviolet radiation, Temperature metrology, Electrodes, Gallium nitride, Sensors, Chemical vapor deposition, Metalorganic chemical vapor deposition
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