KEYWORDS: Feedback control, Sensors, Control systems, Motion controllers, Actuators, Linear filtering, Electronic filtering, Digital filtering, Analog electronics, Ferroelectric materials
This paper presents digital motion control algorithms, real-time
implementation, and experimental results for dynamic motion
control. A digital control system that includes robust feedback,
previewed feedforward, and repetitive control action is
implemented on a piezoelectric actuator driven mechanical stage
and is demonstrated to achieve nanometer level dynamic precision.
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