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Chia-Hua Chang
at Taiwan Semiconductor Manufacturing Co Ltd
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Publications (5)
Proceedings Article | 30 April 2023 Presentation
Curvilinear mask: bridging ILT to HVM
Danping Peng, Shang-Jung Wu, Jue-Chin Yu, Chia-Hua Chang, Kenneth Ho
Proceedings Volume 12495, 124950I (2023) https://doi.org/10.1117/12.2661726
KEYWORDS: Photomasks, Optical proximity correction, Semiconducting wafers, Data processing, Lithography, Inspection, Image processing
Proceedings Article | 19 March 2018 Paper
Mask lithographic performance investigation with computational Monte-Carlo method on advanced mask patterning
Proceedings Volume 10584, 105841E (2018) https://doi.org/10.1117/12.2302685
KEYWORDS: Photomasks, Vestigial sideband modulation, Monte Carlo methods, Model-based design, Beam shaping, Critical dimension metrology, Electron beam lithography, Lithography, Process modeling, Optical lithography
Proceedings Article | 21 February 2012 Paper
Scattering analysis of the indium-tin-oxide (ITO) nanowhiskers on ITO film substrate for thin film solar cell
Proceedings Volume 8256, 82560A (2012) https://doi.org/10.1117/12.908854
KEYWORDS: Scattering, Air contamination, Mie scattering, Light scattering, Thin film solar cells, Thin films, Solar cells, Absorption, Particles, Glasses
Proceedings Article | 21 February 2011 Paper
High efficiency triple-junction solar cells employing biomimetic antireflective structures
Proceedings Volume 7933, 79330N (2011) https://doi.org/10.1117/12.876850
KEYWORDS: Solar cells, Antireflective coatings, Biomimetics, Etching, Stereolithography, Silicon, External quantum efficiency, Photovoltaics, Reflectivity, Lithography
Proceedings Article | 21 February 2011 Paper
Indium-tin-oxide nanowhiskers crystalline silicon photovoltaics combining micro- and nano-scale surface textures
C. H. Chang, M. H. Hsu, W. L. Chang, W. C. Sun, Peichen Yu
Proceedings Volume 7933, 79332M (2011) https://doi.org/10.1117/12.876853
KEYWORDS: Antireflective coatings, Silicon, Solar cells, Silicon solar cells, Crystals, Reflection, External quantum efficiency, Tin, Reflectivity, Scattering
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