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David Vles
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 16 October 2017 Paper
Pellicle films supporting the ramp to HVM with EUV
P. J. van Zwol, M. Nasalevich, W. P. Voorthuijzen, E. Kurganova, A. Notenboom, D. Vles, M. Peter, W. Symens, A. J. M. Giesbers, J. H. Klootwijk, R. W. E. van de Kruijs, W. J. van der Zande
Proceedings Volume 10451, 104510O (2017) https://doi.org/10.1117/12.2280560
KEYWORDS: Extreme ultraviolet, Pellicles, High volume manufacturing, Infrared radiation, Manufacturing
Proceedings Article | 20 October 2016 Paper
Researching new EUV pellicle films for source powers beyond 250 watts
Maxim Nasalevich, Pieter Jan van Zwol, Erik Abegg, Pim Voorthuijzen, David Vles, Mária Péter, Wim van der Zande, Hans Vermeulen
Proceedings Volume 10032, 100320L (2016) https://doi.org/10.1117/12.2255040
KEYWORDS: Extreme ultraviolet, Pellicles, Extreme ultraviolet lithography, Reticles, Graphene, Silicon, Scanners, Multilayers, Metals, Manufacturing
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