Dong-Yun Kim
at SAMSUNG Electronics Co., Ltd.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12052, 120520B (2022) https://doi.org/10.1117/12.2613625
KEYWORDS: Data modeling, Machine learning, Performance modeling, Optical proximity correction, Bridges

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