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Dragan Petrovic
at Technische Univ Wien
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 10 September 2002 Paper
Microgripper for handling and assembly in MEMS produced by SU-8 technology
Dragan Petrovic, Gordana Popovic, Tatjana Petrovic, Andreas Schneider, Ejaz Huq, Helmut Detter, Friedrich Franek
Proceedings Volume 4928, (2002) https://doi.org/10.1117/12.483150
KEYWORDS: Nickel, Microelectromechanical systems, Polishing, Calibration, Semiconducting wafers, Prototyping, Gold, Scanning electron microscopy, Photoresist materials, Ultraviolet radiation
Proceedings Article | 21 November 2001 Paper
uEDM-produced mechanical grippers for handling and assembly in microtechnology
Dragan Petrovic, Gordana Popovic, Elias Chatzitheodoridis, Oscar Del Medico, Ana Almansa, Franz Suemecz, Peter Herbst, Werner Brenner, Helmut Detter, Roland Duffait
Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448963
KEYWORDS: Electrodes, Surface finishing, Scanning electron microscopy, Image quality, Microtechnology, Bridges, Surface roughness, Dielectrics, Tolerancing, Image processing
Proceedings Article | 28 September 2001 Paper
Mechanical gripper system for handling and assembly in MEMS
Dragan Petrovic, Gordana Popovic, Elias Chatzitheodoridis, Oscar Del Medico, Ana Almansa, Helmut Detter, Werner Brenner
Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442937
KEYWORDS: Microelectromechanical systems, Optical sensors, Sensors, Sensing systems, Mechanical sensors, Reliability, Microscopes, Microsystems, Chemical elements, Actuators
Proceedings Article | 5 April 2001 Paper
Assembly of micromechanical components: European network HAFAM
Gordana Popovic, Elias Chatzitheodoridis, Werner Brenner, Dragan Petrovic, Aleksandar Vujanic, Helmut Detter
Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425393
KEYWORDS: Control systems, Microelectromechanical systems, Assembly equipment, Microsystems, Standards development, Sensors, Prototyping, Silicon, Microfabrication, Optical pattern recognition
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