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Dr. Erick Ulin-Avila
SPIE Involvement:
Author
Area of Expertise:
Electromagnetics , nanoscience , terahertz , control systems , quantum systems , light-matter interaction
Publications (1)
Proceedings Article | 3 April 2010 Paper
Flying plasmonic lens at near field for high speed nanolithography
Liang Pan, Yong-Shik Park, Yi Xiong, Erick Ulin-Avila, Li Zeng, Cheng Sun, David Bogy, Xiang Zhang
Proceedings Volume 7637, 763713 (2010) https://doi.org/10.1117/12.848370
KEYWORDS: Plasmonics, Head, Nanolithography, Near field, Optical lithography, Near field optics, Data storage, Lithography, Metals, Optics manufacturing
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