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Fu-Tien Wong
at Taiwan Semiconductor Manufacturing Co Ltd
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Publications (4)
Proceedings Article | 24 April 2003 Paper
Microlens design for compact lens system
Hung-Jen Hsu, Fu-Tien Weng, Chih-Kung Chang, Yu-Kung Hsiao
Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.501330
KEYWORDS: Microlens, Optical filters, Diodes, Quantum efficiency, Lens design, CMOS sensors, Image sensors, Semiconductor manufacturing, Copper indium disulfide, Smart sensors
Proceedings Article | 24 April 2003 Paper
Matching different size masks to effectively improve stepper throughput
Fu-Tien Weng, Hung-Jen Hsu, Chih-Kung Chang, Yu-Kung Hsiao
Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.501442
KEYWORDS: Photomasks, Optical filters, Reticles, Semiconducting wafers, Semiconductor manufacturing, Optical alignment, Smart sensors, Actuators, Microelectromechanical systems, Dysprosium
Proceedings Article | 23 April 2001 Paper
New novel method for solving ASML alignment fail (model error) in color filter process
Fu-Tien Weng, Chung-Sheng Hsiung, Yu-Kung Hsiao, Sheng-Liang Pang, Kuo-Liang Lu
Proceedings Volume 4406, (2001) https://doi.org/10.1117/12.425276
KEYWORDS: Transmittance, Optical filters, Optical alignment, Phase modulation, Semiconducting wafers, Sensors, Contamination, Failure analysis, Systems modeling, Data transmission
Proceedings Article | 8 June 1998 Paper
Nitride film surface properties to reduce nitride residue
Fu-Tien Weng, Chih-Hsiung Lee, Kuo-Liang Lu, Yeong-Pey Chyn
Proceedings Volume 3332, (1998) https://doi.org/10.1117/12.308782
KEYWORDS: Chlorine, Surface properties, Water, Particles, Oxides, Lutetium, Very large scale integration, Manufacturing, Photoresist materials, Yield improvement
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