Dr. Giovanni Piredda Profile

Dr. Giovanni Piredda

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Publications (1)

Proceedings Article | 4 March 2015 Paper

Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses

Matthias Domke, Bernadette Egle, Giovanni Piredda, Gernot Fasching, Marius Bodea, Elisabeth Schwarz

Proceedings Volume 9350, 93501J (2015) https://doi.org/10.1117/12.2079821

KEYWORDS: Silicon, Semiconducting wafers, Pulsed laser operation, Semiconductor lasers, Scanning electron microscopy, Laser processing, Thermal effects, Laser cutting, Laser ablation, Materials processing

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