Mr. Gong Chang Profile

Gong Chang

at Institute of Optics and Electronics, Chinese Academy of Sciences,

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 30 January 2019 Paper

Jingwen Zhang, Fan Bin, Zhiwei Li, Xin Liu, Bincheng Li, Han Yu, Gong Chang

Proceedings Volume 10841, 108410G (2019) https://doi.org/10.1117/12.2512222

KEYWORDS: Reactive ion etching, Electrodes, Etching, 3D modeling, Plasma, Electronics, Plasma etching, Manufacturing, Protactinium, Lithium

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