The development of thin, segmented, grazing-incidence X-ray optics is the basis of future large-area X-ray missions such as Lynx. Adjustable mirror segments have been proposed to achieve sub-arcsecond angular resolution for mm-thickness segments that will deform during mounting and assembly of the optical system. In this paper, we present the development of a novel class of low-voltage thin-film actuators based on electroactive poly-vinylidene fluoride-co-trifluoroethylene (PVDF-TrFE) polymer. Fabrication of PVDF-TrFE thin films is a low-cost, scalable technology that can be easily be translated to production by industrial partners. With processing temperatures below 140 C, electroactive polymer films can be deposited on mirror substrates inducing minimal thermal and coating stress. A full characterization of electrical properties, fabrication yields, and influence functions of PVDF-TrFE actuator arrays deployed on flat Si substrates will be presented.
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