Ms. Huiyan Pan Profile

Huiyan Pan

at Harbin Institute of Technology

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Publications (2)

Proceedings Article | 13 November 2007 Paper

The influence of doping concentration on piezoresistive temperature characteristics of polysilicon nanofilms

Xiaowei Liu, Xuebin Lu, Rongyan Chuai, Huiyan Pan, Xilian Wang, Jinfeng Li

Proceedings Volume 6423, 64232N (2007) https://doi.org/10.1117/12.779870

KEYWORDS: Doping, Resistance, Silicon, Sensors, Temperature metrology, Scanning electron microscopy, Transmission electron microscopy, Silicon films, Low pressure chemical vapor deposition, Electron microscopes

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Proceedings Article | 21 April 2006 Paper

The influences of thickness on piezoresistive properties of poly-Si nanofilms

Xiaowei Liu, Rongyan Chuai, Minghao Song, Huiyan Pan, Xiaowei Xu

Proceedings Volume 6186, 61860V (2006) https://doi.org/10.1117/12.662348

KEYWORDS: Silicon, Doping, Resistance, Crystals, Sensors, Silicon films, Data modeling, Scanning electron microscopy, Actuators, Microelectromechanical systems

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