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Irene Shi
at New Ray Mask Technology Corp
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Author
Publications (1)
Proceedings Article | 21 November 2023 Poster + Paper
Research and optimization of electronic charge phenomena on CDSEM imaging of binary photomask
Jiaying Luo, Irene Shi, Brian Zheng, Yuming Gan, Zhuowei Zhang, Tony Ge, Eric Guo
Proceedings Volume 12751, 1275110 (2023) https://doi.org/10.1117/12.2684538
KEYWORDS: Photomasks, Binary data, Plasma, Ultraviolet radiation, Scanning electron microscopy, Critical dimension metrology, Sputter deposition, Reflection, Oxygen, Mixtures
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