Dr. Isao Hirano Profile

Dr. Isao Hirano

at Tokyo Ohka Kogyo Co Ltd

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Publications (1)

Proceedings Article | 1 May 2023 Presentation + Paper

Development of a novel cleaner for contaminant removal in equipment used in semiconductor manufacturing which reduces time and solvent waste

Isao Hirano, Motoki Takahashi, Kuniteru Soeda, Masaki Kadowaki, Komei Hirahara, Takayuki Hosono, Jun Koshiyama, Tomoyuki Yazawa

Proceedings Volume 12498, 124980B (2023) https://doi.org/10.1117/12.2656914

KEYWORDS: Tunable filters, Semiconducting wafers, Contamination, Polymers, Metals, Coating, Polymer thin films, Optical lithography, Porosity, Coating equipment

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