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Issam M. Bait Bahadur
at Univ of Toronto
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Publications (1)
Proceedings Article | 6 January 2006 Paper
Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications
Issam Bahadur, James Mills
Proceedings Volume 6111, 61110H (2006) https://doi.org/10.1117/12.644429
KEYWORDS: Sensors, 3D modeling, Microelectromechanical systems, Resonators, Silicon, Surface micromachining, Reliability, Capacitance, Microfluidics, Factor analysis
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