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Izumi Nitta
at Fujitsu Labs Ltd
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Publications (1)
Proceedings Article | 28 March 2017 Presentation + Paper
A fuzzy pattern matching method based on graph kernel for lithography hotspot detection
Izumi Nitta, Yuzi Kanazawa, Tsutomu Ishida, Koji Banno
Proceedings Volume 10148, 101480U (2017) https://doi.org/10.1117/12.2257654
KEYWORDS: Lithography, Machine learning, Design for manufacturability, Feature extraction, Feature selection, Optical proximity correction, Image classification, Data modeling, Computer programming, Fuzzy logic, Manufacturing, Pattern recognition
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