CONFERENCE PROCEEDINGS
Advanced Search
Jack Wong
at IBM Thomas J. Watson Research Ctr.
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 28 April 2023 Presentation + Paper
Impact of high-NA half-field to full-field overlay performance by Monte Carlo simulations
Proceedings Volume 12494, 124940S (2023) https://doi.org/10.1117/12.2661339
KEYWORDS: Monte Carlo methods, Extreme ultraviolet lithography, Scanners, Deep ultraviolet, Design and modelling, Semiconducting wafers, Overlay metrology, Photomasks, Extreme ultraviolet, Error analysis
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top