Jing Yi Chen
at National Central Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 August 2005 Paper
Proceedings Volume 5931, 593115 (2005) https://doi.org/10.1117/12.616319
KEYWORDS: Silicon, Ultraviolet radiation, Optical components, Thin films, Refractive index, Silicon films, Plasma enhanced chemical vapor deposition, Scanning electron microscopy, Chemical elements, Optical properties

Proceedings Article | 8 October 2004 Paper
Proceedings Volume 5515, (2004) https://doi.org/10.1117/12.559296
KEYWORDS: Silicon, Diffractive optical elements, Silicon films, Ultraviolet radiation, Transmittance, Refractive index, Plasma enhanced chemical vapor deposition, Optical components, Nanolithography, Chemical elements

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