For the demand of line chromatic confocal displacement measurement, a new multi-channel compact spectrometer needs to be developed. In this paper, a microlens array-grating structure, in which one side is microlens array and the other side is blazed gating, is proposed for a miniature spectrometer. The microlens array-grating structure can be pressed in the form of "sandwich" by soft lithography using PDMS material. The micro lens array is a 10*10 mm square, consisting of 45*45 microlens elements, each with a diameter of 220 μm, and the outer diameters of the elements are closely connected with each other. The blazed grating is an equal period grating with a grating line density of 600 lines /mm and a blazed angle of 8°37’. By optimizing the design parameters, the image resolution of the spectrometer based on the grating-microlens array is within 1 nm in the wide band of 400 nm~700 nm. Different microlens grating surface elements have performance consistency with a standard deviation of about 0.5 nm, which can realize the function of arrayed micro-spectrometer.
Spectral reflectance plays an important role in the evaluation of the object surface, such as the color, the roughness. A new method is proposed to measure the spectral reflectance at a fixed incident angle. The chromatic confocal displacement sensor is modified with an annular stop to generate a hollow cone beam of incident light on the to-be measured sample surface. With self-reference strategy, the upper and lower envelops are derived from the axial scanning of the dispersion probe, whose minus is named as self-reference spectrum. Thus, the reflectance at every wavelength among the valid dispersion bandwidth can be achieved by comparing the self-reference spectra of the sample surface and a standard mirror with known spectral reflectance. With the proposed method and experimental setup, the spectral reflectance of several metal surfaces is obtained and compared with their theoretical spectral reflectance within ±0.04. It proves that the modified chromatic confocal can provide feasible results for the spectral reflectance measurement.
Thickness measurement for the optical thin films is very important for the industries of mechanics, printing, battery and so on. Infrared transmittance method is a very useful method to achieve the physical response, which is related to the film thickness according to the Lambert-Beer law. A detail measurement system is designed with two light paths of reflectance and transmittance, consisting of the light source, filter motor, beam splitter, paraboloid mirror, PbSe detector, and so on. An experimental setup is also established with two different infrared wavelengths by two different bandpass optical filters. The stability of the measurement system is tested to be only about 0.3% in 10 min. The experiments show the feasibility of the proposed double-wavelength infrared transmittance method for film thickness measurement.
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