Jochen Herrmann
at Heidelberg Instruments Mikrotechnik GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 April 2024 Poster + Paper
M. Russew, A. Benker, J. Herrmann, T. Oberbiermann, S. Grützner, M. Koch, J. Wolf, A. Voigt, A. Schleunitz, G. Grützner
Proceedings Volume 12956, 129560R (2024) https://doi.org/10.1117/12.3010843
KEYWORDS: Polymers, Advanced patterning, Film thickness, Two photon polymerization, Passivation, Optical lithography, Micro optics, Liquids, Manufacturing, Lithography

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