Dr. Justin Rouxel Profile

Dr. Justin Rouxel

Scientific researcher at Thales Research & Technology

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Publications (2)

Proceedings Article | 13 April 2020 Presentation + Paper

Toward a SPR imaging in situ system to detect marine biotoxin

Enora Prado, Florent Colas, Sebastien Laurent, Morgan Tardivel, Justine Evrard, Bertrand Forest, Alan Bocher, Justin Rouxel

Proceedings Volume 11361, 113610J (2020) https://doi.org/10.1117/12.2559856

KEYWORDS: Sensors, Gold, Water, Imaging systems, Prisms, Biosensors, Refractive index, Ocean optics, Dielectrics, Cameras

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Proceedings Article | 14 May 2012 Paper

Hybrid metrology for critical dimension based on scanning methods for IC manufacturing

J. Foucher, N. Griesbach Schuch Figueiro, J. Rouxel, R. Thérèse

Proceedings Volume 8378, 83780F (2012) https://doi.org/10.1117/12.919650

KEYWORDS: Metrology, Critical dimension metrology, Data fusion, Image fusion, Calibration, 3D metrology, Scatterometry, Transmission electron microscopy, Manufacturing, Semiconductors

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