Ms. Komal Thakur Profile

Komal Thakur

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Publications (1)

Proceedings Article | 24 May 2022 Presentation + Paper

New critical dimension optical metrology for submicron high-aspect-ratio structures using spectral reflectometry with supercontinuum laser illumination

Wei-Hsin Chein, Fu-Sheng Yang, Komal Thakur, Guo-Wei Wu, Liang-Chia Chen

Proceedings Volume 12137, 121370E (2022) https://doi.org/10.1117/12.2621895

KEYWORDS: Reflectometry, Spectroscopy, Scanning electron microscopy, Laser metrology, Image processing, Optical metrology, Etching, Critical dimension metrology, Objectives, Laser sources

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