Krishnaparvathy Puthankovilakam
Doctoral Student at EPFL
Publications (6)

Proceedings Article | 27 February 2017 Paper
Proceedings Volume 10120, 1012010 (2017) https://doi.org/10.1117/12.2251379
KEYWORDS: Computer simulations, Objectives, Modulation, Distance measurement, Radio propagation, Electromagnetism, Diffraction, Near field diffraction, Interferometry, Electromagnetic radiation, Diffraction gratings, Singular optics, Polarization, Near field, Nanofabrication

Proceedings Article | 15 March 2016 Paper
Proceedings Volume 9780, 97800V (2016) https://doi.org/10.1117/12.2219062
KEYWORDS: Printing, Optical proximity correction, Binary data, Phase measurement, Phase shift keying, Image resolution, Microscopy, Diffraction, Visualization, Phase shifting

Proceedings Article | 4 March 2016 Paper
Proceedings Volume 9764, 97640B (2016) https://doi.org/10.1117/12.2214341
KEYWORDS: Photomasks, Phase shift keying, Phase measurement, Modulation, Printing, Lithography, Neodymium, Diffraction, Stray light, Geometrical optics

SPIE Journal Paper | 29 January 2016 Open Access
JM3, Vol. 15, Issue 02, 021203, (January 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.2.021203
KEYWORDS: Phase shifts, Photomasks, Printing, Phase measurement, Microscopy, Diffraction, Quartz, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 18 March 2015 Paper
Proceedings Volume 9426, 94260I (2015) https://doi.org/10.1117/12.2085804
KEYWORDS: Printing, Photomasks, Phase shifts, Diffraction, Phase shifting, Microscopy, Phase measurement, Optical proximity correction, Quartz, Tolerancing

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top