Dr. Kriti K. Kohli Profile

Dr. Kriti K. Kohli

at GLOBALFOUNDRIES Inc

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Publications (1)

Proceedings Article | 24 March 2017 Presentation + Paper

Automated detection and classification of printing sub-resolution assist features using machine learning algorithms

Kriti Kohli, Mark Jobes, Ioana Graur

Proceedings Volume 10147, 101470O (2017) https://doi.org/10.1117/12.2261417

KEYWORDS: SRAF, Optical proximity correction, Machine learning, Image classification, Detection and tracking algorithms, Optical lithography, Machine vision, Computer vision technology, Principal component analysis, Image processing, Semiconducting wafers, Scanning electron microscopy, Visual process modeling, Data modeling

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