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Kyoko Sakai
at Toppan Printing Co Ltd
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Publications (1)
Proceedings Article | 20 August 2004 Paper
Surface organic compound contamination as a significant factor in substrate transmittance reduction in the VUV region
Kyoko Sakai, Yo Sakata, Yuichi Fukushima, Yasuhiro Okumoto
Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557722
KEYWORDS: Transmittance, Contamination, Glasses, Natural surfaces, Vacuum ultraviolet, Silicon, Toxic industrial chemicals, Lithography, Absorption, Photomasks
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