Polyimide is used as sacrificial layer material during the research on bi-material micro-cantilever structure. Contrasted with other sacrificial layer materials, polyimide is marked with excellent properties, like good insulation, big coefficient of elasticity, big coefficient of linear expansion and outstanding mechanical property. This dissertation has studied the preparing process of sacrificial layer, like sacrificial layer imaging and solidifying, and different methods to release sacrificial layer and how to control all kinds of parameters to obtain the best suspension. Finally, the optimized process parameters are obtained.
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