Prof. Lirong Qiu Profile

Prof. Lirong Qiu

at Bejing Institute of Technology

SPIE Involvement:

Author

Profile Summary

Lirong Qiu received her BS and MS degrees by the Department of Automatic Measurement and Control Engineering of Xi’an Jiaotong University in 1997 and 2000, respectively, and received the PhD degree in 2005 in instrumentation science and technology from the Department of Automatic Measurement and Control Engineering of Harbin Institute of Technology. She works as a lecturer in the Department of Optical Engineering at Beijing Institute of Technology. Her current research fields are precise optoelectronic measurement technology and instrumentation, optical superresolution technology and confocal measurement technology.

Publications (29)

Proceedings Article | 13 December 2024 Paper

Paper

High-speed and large range measurement technology of microstructure surface morphology based on laser scanning lateral differential confocal

Zhenru Wang, Sen Yu, Lirong Qiu

Proceedings Volume 13498, 134980F (2024) https://doi.org/10.1117/12.3048143

KEYWORDS: Confocal microscopy, Curvature sensing, Laser scanners, Galvanometers, Laser microstructuring, Time metrology, Signal intensity, Semiconducting wafers, Objectives, Microscopes

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With the development of precision manufacturing technology, the demand for fast measurement of surface morphology and structure at the micro and nano scale is becoming increasingly important. Laser scanning confocal microscopy is widely used for morphology characterization of micro and nano structures due to its high resolution and no need for special sample processing. In order to ensure the measurement accuracy of the measured sample morphology, confocal microscopy generally uses smaller axial scanning steps and more scanning layers, which increases the measurement time; And for samples with a measured area exceeding the transverse scanning field of view of the galvanometer, multiple fields of view need to be measured and spliced to obtain a complete surface morphology. Therefore, the measurement time is multiplied, which is difficult to meet the needs of large-scale rapid detection and iteration of micro and nano processed products in the field of precision manufacturing. In order to achieve fast and large range measurement of micro/nano structure samples, this paper proposes a method of using the linear region of laser scanning transverse differential confocal curve to quickly measure the surface morphology of a field of view, and combining with displacement stage scanning, feature point detection, and morphology image stitching to achieve rapid measurement of large range micro/nano structure morphology. This method uses a galvanometer to quickly scan and obtain the front and rear focal light intensity signals 𝐼_𝐴 and 𝐼_𝐵. The linear region near the zero point of the differential confocal intensity curve are fitted using a cubic polynomial to obtain a linear sensing curve with good linearity and an accurate correspondence between the zero point and the height of the sample. This enables the fast acquisition of micro/nano structure surface morphology within the effective measurement range of the sensing curve without axial scanning. As for samples with heights exceeding the effective measurement range of the linear sensing curve, measurements can be completed quickly with a larger axial scanning step and fewer scanning layers compared to confocal microscopy. For large range samples, this method first quickly measures the surface morphology within a horizontal field of view, then sets a certain proportion of overlapping areas, switches to a new measurement field by the XY lateral displacement stage, and sequentially completes the scanning of multiple sub areas of the samples. Finally, the SURF feature point detection algorithm is used to extract the feature points of the overlapping areas for morphology map stitching, achieving high-precision and rapid measurement of large range micro/nano structures. The measurement method proposed in this article has fast speed and high accuracy, providing an efficient detection method for the field of precision manufacturing.

Proceedings Article | 29 November 2023 Poster

Poster

A laser confocal vibration signal processing method based on wavelet transform

Demin Xu, Yuebo Wu, Lirong Qiu, Ke-Mi Xu, Weiqian Zhao

Proceedings Volume 12769, 1276919 (2023) https://doi.org/10.1117/12.2686959

KEYWORDS: Vibration, Signal processing, Confocal microscopy, Wavelet transforms, Laser processing, Signal to noise ratio, Wavelets, Denoising, Vibrometry, Signal intensity

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Proceedings Article | 29 November 2023 Poster

Poster

Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning

Xu Wang, Bo Peng, Han Cui, Yun Wang, Weiqian Zhao, Hongyan Deng, Lirong Qiu

Proceedings Volume 12767, 1276713 (2023) https://doi.org/10.1117/12.2686945

KEYWORDS: Mirrors, Microelectromechanical systems, Laser induced breakdown spectroscopy, Portability, Microscopy, Signal detection, Miniaturization, Aspheric lenses, Spatial resolution, Objectives

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Proceedings Article | 29 November 2023 Poster

Poster

Research on the method of determining the number of layers and mapping of two-dimensional materials based on high-precision confocal Raman spectroscopy

Angze Li, Xiaojuan Chuai, Han Cui, Lirong Qiu, Weiqian Zhao

Proceedings Volume 12767, 1276714 (2023) https://doi.org/10.1117/12.2686946

KEYWORDS: Raman spectroscopy, 2D materials, Confocal microscopy, Molybdenum, Silicon, Laser systems engineering, Imaging spectroscopy, Spectroscopy, Spatial resolution, Reflection

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Proceedings Article | 24 November 2023 Paper

Paper

Research on laser confocal free-form surface measurement method based on adaptive ant colony algorithm

Xiaoxue Zhu, Yuhan Liu, Lirong Qiu, Weiqian Zhao

Proceedings Volume 12935, 129352Z (2023) https://doi.org/10.1117/12.3007704

KEYWORDS: Confocal microscopy, Sensors, Design and modelling, Detection and tracking algorithms, Objectives, Aspheric lenses, Optical surfaces, Laser soldering, Laser applications, Data acquisition

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Proceedings Article | 9 January 2023 Poster

Poster

In-situ topographic characterization and mechanical mapping by divided-aperture confocal Brillouin microscopy

Yunhao Su, Weiqian Zhao, Lirong Qiu

Proceedings Volume 12316, 123160I (2023) https://doi.org/10.1117/12.2655746

KEYWORDS: Confocal microscopy, Microscopy, Light scattering, Spatial resolution, Tissues, Microscopes, Imaging systems, Associative arrays, Scattering, Materials science

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Proceedings Article | 5 January 2023 Poster

Poster

Three-dimensional high-precision mineral mapping using confocal controlled LIBS microscope

Chunjing He, Angze Li, Lirong Qiu, Weiqian Zhao

Proceedings Volume 12316, 123160H (2023) https://doi.org/10.1117/12.2655745

KEYWORDS: Laser induced breakdown spectroscopy, Minerals, Confocal microscopy, Microscopes, Multi-element lenses, Chemical elements, Spatial resolution, Principal component analysis, Chemometrics

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Laser induced breakdown spectroscopy (LIBS) termed an effective technique to confirm the elemental composition of geologic, due to its unique elemental ‘fingerprint’ properties and qualitative or quantitative analytical performance. However, the low focusing accuracy and poor spatial resolution of traditional LIBS technology limits its application in minerals with complex topography. To address this issue, we constructed a confocal controlled LIBS (CCLIBS) microscope for three-dimensional elemental mapping of natural minerals. The CCLIBS system is an innovative fusion of confocal microscopy and LIBS technology, which significantly improves the spatial resolution and the stability of LIBS spectrum. With this system, the geometry and elemental distribution of natural agate ores are accurately obtained. Then, a common chemometric method of principal component analysis (PCA) was conducted to analyse the differences in such spectral lines. According to the differences of wavelength and intensity characteristics, the typical spectra were selected to map the elemental distribution. Finally, the three elements with the highest PC scores were selected to construct the multi-element fusion mapping, which can reflect the distribution of elements more intuitively. In this paper, we innovatively integrate three-dimensional (3D) morphology with multi-element distribution to characterize the spatial distribution of elements. Compared with single-element fusion, multi-element fusion is more intuitive and clearer, which is of great significance for the analysis of complex components of natural minerals. To solve the problems of low focusing accuracy and poor spatial resolution of traditional LIBS technology, we constructed a confocal controlled LIBS microscope for three-dimensional elemental mapping of natural minerals. The microscope is an innovative fusion of confocal microscopy and LIBS technology, which significantly improves the spatial resolution and stability of spectrum, ensuring that the system can achieve minimal ablation at focal point. Furthermore, we integrate three-dimensional (3D) morphology with multi-element distribution to characterize the spatial distribution of elements. The innovative method provides an effective way for elemental characterization in the fields of biomedicine, materials science and geological science.

Proceedings Article | 21 December 2022 Presentation

Presentation

Freeform surface measurement by virtual differential confocal based on reference planes monitoring

Wenbin Wang, Lirong Qiu, Weiqian Zhao

Proceedings Volume 12319, 123190A (2022) https://doi.org/10.1117/12.2656177

KEYWORDS: Confocal microscopy, Data modeling, 3D modeling, Signal processing, Precision measurement, Clouds, 3D metrology, Surface roughness, Sensors, Photovoltaics

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Proceedings Article | 14 November 2021 Presentation + Paper

Presentation + Paper

Divided-aperture dual-differential confocal microscopy

Rongji Li, Ruirui Zhang, Han Cui, Demin Xu, Han Ma, Lirong Qiu

Proceedings Volume 11914, 1191414 (2021) https://doi.org/10.1117/12.2621457

KEYWORDS: Confocal microscopy, Signal processing, Sensors, Reflectivity, Curium, 3D imaging standards

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Proceedings Article | 14 November 2021 Presentation + Paper

Presentation + Paper

A measurement method of curvature radius and shell thickness of laser fusion capsule by combining computer vision and virtual laser differential confocal technology

Xianxian Ma, Lirong Qiu, Yun Wang

Proceedings Volume 11914, 119140V (2021) https://doi.org/10.1117/12.2615583

KEYWORDS: Laser applications, Confocal microscopy, Laser welding, Machine vision, Computer vision technology, Sensors, Photography, Precision measurement, Microscopes, Charge-coupled devices

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Proceedings Article | 6 November 2018 Paper

Paper

Accuracy evaluations of axial localisation algorithms in confocal microscopy

Rongjun Shao, Weiqian Zhao, Lirong Qiu, Yun Wang, Ruirui Zhang

Proceedings Volume 10819, 108191O (2018) https://doi.org/10.1117/12.2501031

KEYWORDS: Confocal microscopy, Signal to noise ratio, Monochromatic aberrations, Error analysis, Metrology, Sensors, Interference (communication), Optoelectronics, Microscopes

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Proceedings Article | 10 February 2017 Paper

Paper

Research on virtual pinhole parameters optimization in laser differential confocal theta microscope

Xiangye Zhao, Yun Wang, Lirong Qiu, Weiqian Zhao, Ke Zhu

Proceedings Volume 10250, 102501Y (2017) https://doi.org/10.1117/12.2266831

KEYWORDS: Confocal microscopy, Microscopes, Optoelectronics, Precision measurement, Stereoscopy, Image resolution

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Proceedings Article | 8 October 2015 Paper

Paper

Laser differential reflection-confocal lens thickness measurement

Nan Zhou, Yun Wang, Weiqian Zhao, Lirong Qiu, Lingfeng Chen

Proceedings Volume 9677, 96771I (2015) https://doi.org/10.1117/12.2199689

KEYWORDS: Optical testing, Reflectors, Error analysis, Confocal microscopy, Distance measurement, Sensors, Precision measurement, Interferometers, Refractive index, Beam splitters

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Proceedings Article | 5 August 2015 Paper

Paper

Lens central thickness measurement by laser reflection-confocal technology

Lirong Qiu, Yongkui Guo, Weiqian Zhao, Yang Xiao

Proceedings Volume 9618, 961806 (2015) https://doi.org/10.1117/12.2193394

KEYWORDS: Reflectors, Laser applications, Ray tracing, Calibration, Confocal microscopy, Lawrencium, Capacitors, Sensors, Collimation, Refractive index

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Proceedings Article | 5 August 2015 Paper

Paper

The method of axial drift compensation of laser differential confocal microscopy based on zero-tracking

Yajie Wang, Han Cui, Yun Wang, Lirong Qiu, Weiqian Zhao

Proceedings Volume 9618, 96180X (2015) https://doi.org/10.1117/12.2193289

KEYWORDS: Confocal microscopy, Sensors, Ferroelectric materials, Microscopes, Environmental sensing, Optical testing, Laser applications, Time metrology, Image resolution, Visualization

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Proceedings Article | 6 March 2015 Paper

Paper

Image inpainting for the differential confocal microscope

Lirong Qiu, Lei Wang, Dali Liu, Maosheng Hou, Weiqian Zhao

Proceedings Volume 9446, 94463D (2015) https://doi.org/10.1117/12.2181352

KEYWORDS: Confocal microscopy, Microscopes, Image restoration, Signal detection, Image quality, Optical simulations, Statistical modeling, Computer simulations, Sensors, Laser damage threshold

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Proceedings Article | 28 May 2014 Paper

Paper

Study on the stitching interferometry for the surface profile measurement of a large aperture component

Weirui Zhao, Lirong Qiu, Weiqian Zhao, Genrui Cao

Proceedings Volume 9110, 91100W (2014) https://doi.org/10.1117/12.2053182

KEYWORDS: Wavefronts, Stitching interferometry, Mirrors, Zernike polynomials, Interferometers, Phase shifts, Phase shifting, Computing systems, Spherical lenses, Optoelectronics

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Proceedings Article | 23 December 2013 Paper

Paper

A data processing method based on tracking light spot for the laser differential confocal component parameters measurement system

Rongjun Shao, Lirong Qiu, Jiamiao Yang, Weiqian Zhao, Xin Zhang

Proceedings Volume 9043, 90430L (2013) https://doi.org/10.1117/12.2034881

KEYWORDS: Confocal microscopy, Gaussian filters, Data processing, Interferometers, Laser processing, Signal processing, Charge-coupled devices, Interference (communication), Microscopes, Digital imaging

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Proceedings Article | 19 December 2013 Paper

Paper

Fast image restoration algorithm of differential confocal microscopy imaging

Guanyi Wang, Dali Liu, Lirong Qiu

Proceedings Volume 9045, 904513 (2013) https://doi.org/10.1117/12.2034854

KEYWORDS: Image restoration, Image processing, Point spread functions, Confocal microscopy, Imaging systems, Image quality, Super resolution, Image resolution, Digital image processing, Image compression

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SPIE Journal Paper | 23 October 2013

Confocal multiple-transmitted-light interference microscope with increased lateral resolution

Lirong Qiu, Weiqian Zhao

OE, Vol. 52, Issue 10, 100504, (October 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.10.100504

KEYWORDS: Confocal microscopy, Microscopes, Curium, Point spread functions, Objectives, Reflectivity, Near field optics, Optical engineering, Telescopes, Optoelectronics

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Proceedings Article | 10 October 2013 Paper

Paper

Measuring the lens focal length by laser confocal technique

Hualing Wu, Jiamiao Yang, Liurong Qiu, Weiqian Zhao

Proceedings Volume 8916, 89161E (2013) https://doi.org/10.1117/12.2035803

KEYWORDS: Reflectors, Confocal microscopy, Interferometry, Laser applications, Beam splitters, Interferometers, Sensors, Phase interferometry, Fiber optics, Optical testing

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SPIE Journal Paper | 7 August 2013

Generation of high-order polarized vortex beam by achromatic meniscus axicon doublet

Xusheng Zhang, Lirong Qiu

OE, Vol. 52, Issue 08, 080503, (August 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.8.080503

KEYWORDS: Polarization, Axicons, Wave plates, Birefringence, Glasses, Collimation, Liquid crystals, Visible radiation, Refractive index, Prisms

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SPIE Journal Paper | 24 April 2013

Generation of radially and azimuthally polarized light by achromatic meniscus axicon

Xusheng Zhang, Lirong Qiu

OE, Vol. 52, Issue 04, 048001, (April 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.4.048001

KEYWORDS: Axicons, Wave plates, Polarization, Prisms, Liquid crystals, Glasses, Refractive index, Collimation, Transform theory, Optical tweezers

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Proceedings Article | 31 January 2013 Paper

Paper

Dual-axes tri-differential confocal sensing technique with higher axial resolution and SNR

Chao Liu, Lirong Qiu, Qin Jiang, Weiqian Zhao

Proceedings Volume 8759, 87593P (2013) https://doi.org/10.1117/12.2014593

KEYWORDS: Confocal microscopy, Sensors, Charge-coupled devices, Signal to noise ratio, CCD image sensors, Curium, Objectives, Microscopy, Molybdenum, Point spread functions

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Proceedings Article | 30 November 2011 Paper

Paper

Laser two-dimensional angle dynamic measurement system

Lirong Qiu, Haorong Guo, Yun Wang, Weiqian Zhao

Proceedings Volume 8201, 82010G (2011) https://doi.org/10.1117/12.907158

KEYWORDS: Sensors, Mirrors, Dynamical systems, Laser development, Precision measurement, Imaging systems, Optical testing, Laser applications, Optoelectronics, System integration

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Proceedings Article | 3 February 2009 Paper

Paper

Effect of pupil filter position on superresolution properties of confocal measurement system

Lirong Qiu, Weiqian Zhao, Junjie Guo, Dingguo Sha

Proceedings Volume 7160, 716036 (2009) https://doi.org/10.1117/12.812000

KEYWORDS: Confocal microscopy, Super resolution, Imaging systems, Optical filters, 3D microstructuring, Curium, Phase only filters, Sensors, Spatial resolution, Objectives

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Proceedings Article | 6 November 2006 Paper

Paper

Phase-only pupil filtering confocal measurement system with higher lateral resolution

Lirong Qiu, Zhengde Feng, Dingguo Sha

Proceedings Volume 6357, 635740 (2006) https://doi.org/10.1117/12.717275

KEYWORDS: Confocal microscopy, Phase only filters, Curium, Optical filters, Sensors, Super resolution, Objectives, 3D microstructuring, 3D metrology, Signal detection

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Proceedings Article | 6 November 2006 Paper

Paper

A three-zone pulse-only pupil filter for improving lateral resolution

Lirong Qiu, Weiqian Zhao, Dingguo Sha

Proceedings Volume 6357, 63573Z (2006) https://doi.org/10.1117/12.717271

KEYWORDS: Super resolution, Phase only filters, Optical filters, Imaging systems, Image filtering, Curium, Optical imaging, Image resolution, Genetic algorithms, Confocal microscopy

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SPIE Journal Paper | 1 November 2006

Approach to higher spatial resolutions in a laser probe measurement system using a phase-only pupil filter

Lirong Qiu, Weiqian Zhao, Zhengde Feng, Xuemei Ding

OE, Vol. 45, Issue 11, 113601, (November 2006) https://doi.org/10.1117/12.10.1117/1.2388944

KEYWORDS: Spatial resolution, Confocal microscopy, Optical filters, Super resolution, Phase only filters, Sensors, Signal detection, Laser beam diagnostics, Laser systems engineering, Optical engineering

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Showing 5 of 29 publications

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