The aluminium oxynitride system offers the possibility to obtain a wide range of optical responses, by combining
metallic aluminium, aluminium oxide and aluminium nitride properties, and thus opening a significant number of
possible applications. The main purpose of the present work is to study the variation of the optical properties of AlNxOy
thin films as a function of their composition (by varying both x and y coefficients), and the correspondent changes in
their morphology and structure. The films were deposited by DC reactive magnetron sputtering, with the discharge
parameters monitored during the deposition in order to control the chemical composition. The measurements reveal a
smooth change of films Reflectance/Transmittance as a function of the concentration ratio of non metallic elements
(O+N) to metallic Al, thus revealing the possibility to tailor the films optical properties according to the application
envisaged.
Conference Committee Involvement (1)
Third International Conference on Applications of Optics and Photonics
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