Dr. Marion Grould Profile

Dr. Marion Grould

at POLLEN Metrology

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Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

Digital twin technology introduction to increase yield of processes

Marion Grould, Julien Baderot, Isaac Sanou, Sergio Martinez, Johann Foucher

Proceedings Volume 12954, 1295412 (2024) https://doi.org/10.1117/12.3010460

KEYWORDS: Data modeling, Education and training, Performance modeling, Modeling, Mathematical optimization, Quantum experiments, Data processing, Process engineering, Process modeling, Quantum processes

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Proceedings Article | 27 April 2023 Poster + Paper

Edge detection using deep learning pipelines for TEM and SEM metrology by proposing generic and specific approaches

Edgar Loza, Julien Baderot, Marion Grould, Emilie Pery, Frédéric Chausse, Sergio Martinez, Johann Foucher

Proceedings Volume 12496, 124962P (2023) https://doi.org/10.1117/12.2657908

KEYWORDS: Edge detection, Metrology, Scanning electron microscopy, Data modeling, Transmission electron microscopy, Deep learning, Semiconductors, Critical dimension metrology

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Proceedings Article | 22 February 2021 Presentation + Paper

Parametric modeling of patterned object with variations and expert tuning of edge placement

B. Darbon, M. Grould, N. Clément, J. Baderot, S. Martinez, J. Foucher

Proceedings Volume 11615, 116150K (2021) https://doi.org/10.1117/12.2583810

KEYWORDS: Machine learning, Semiconductors, Microscopes, Metrology, Process engineering, Manufacturing, Image processing, Databases, Algorithm development, Transmission electron microscopy

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