Mr. Mark S. Percevault Profile

Mark S. Percevault

at Faraday Photonics LLC

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Author

Publications (1)

Proceedings Article | 22 September 1997 Paper

Beam delivery focusing objectives for excimer laser micromachining applications

Mark Percevault, Donald Wilson

Proceedings Volume 3110, (1997) https://doi.org/10.1117/12.281353

KEYWORDS: Ultraviolet radiation, Objectives, Excimer lasers, Optics manufacturing, Lens design, Silica, Beam delivery, Micromachining, Microscopes, UV optics

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