Prof. Masaharu Shiratani Profile

Prof. Masaharu Shiratani

at Kyushu Univ

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Author

Publications (4)

Proceedings Article | 10 April 2024 Presentation

Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing II

Hakaru Mizoguchi, Kentaro Toita Tomita, Masaharu Shiratani, Daisuke Nakamura, Yukihiro Yamagata, Takeshi Higashiguchi, Atsushi Sunahara

Proceedings Volume PC12953, PC129530Q (2024) https://doi.org/10.1117/12.3010018

KEYWORDS: Extreme ultraviolet, Plasma, Semiconductor manufacturing, Carbon dioxide lasers, Tin, Semiconductors, Scattering, Pulsed laser operation, Magnetism, Magnetic semiconductors

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Proceedings Article | 13 March 2015 Paper

ZnO-based semiconductors with tunable band gap for solar sell applications

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proceedings Volume 9364, 93640P (2015) https://doi.org/10.1117/12.2078114

KEYWORDS: Quantum wells, Zinc oxide, Solar cells, Solar energy, Semiconductors, Indium gallium nitride, Indium gallium arsenide, Optical simulations, Thin films, Crystals

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SPIE Journal Paper | 27 August 2014 Open Access

Off-axis sputter deposition of ZnO films on c-sapphire substrates by utilizing nitrogen-mediated crystallization method

Naho Itagaki, Kazunari Kuwahara, Koichi Matsushima, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

OE, Vol. 53, Issue 08, 087109, (August 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.8.087109

KEYWORDS: Zinc oxide, Crystals, Sputter deposition, Sapphire, Particles, Oxygen, Ions, Gallium nitride, Argon, Luminescence

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Proceedings Article | 8 March 2014 Paper

Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proceedings Volume 8987, 89871A (2014) https://doi.org/10.1117/12.2041081

KEYWORDS: Zinc oxide, Sputter deposition, Crystals, Sapphire, Gallium nitride, Nitrogen, Oxygen, Ions, Luminescence, Light emitting diodes

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