Mei-Yun Zhang
at National Taiwan Univ of Science and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 March 2022 Poster + Paper
Proceedings Volume 12001, 120010G (2022) https://doi.org/10.1117/12.2608660
KEYWORDS: Light emitting diodes, Semiconducting wafers, Silicon, Wafer bonding, Deep reactive ion etching, Etching, Gallium nitride

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