A micromechanical actuator has been developed using materials with different coefficients of thermal expansion
combined in a sandwich cantilever structure. The actuator is thermally operated and could be used in different
applications including temperature controlled electrical switches and sensors. A novel application for the microactuator
is as the prime mover for a micro multipede. The latter is essentially a multicantilever array where each element can be
actuated in sequence to produce planar movements. The actuation is provided by micro heaters integrated into each
cantilever. This paper presents the design of an optical system for monitoring the movements of a micro multipede using
two methods. The first method, triangulation was adopted to measure the downward movement and flattening of the
cantilevers under load. The second method involved direct deflection measurement with an optical microscope. The
paper presents both simulation and test results for temperature and mechanical loading and the relationship between
electrical power and cantilever deflection.
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