Dr. Ming-Chih Chen Profile

Dr. Ming-Chih Chen

Lithography Engineer at Taiwan Mask Corp

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 17 April 2012 Paper

The effect of puddle megasonic cleaning for advanced photomask with subresolution assist features (SRAFs)

Ming-Chih Chen, Hsiang-Jen Yang, Chen-Rui Tseng

Proceedings Volume 8352, 83520T (2012) https://doi.org/10.1117/12.921280

KEYWORDS: SRAF, Chromium, Cavitation, Oxides, Photomasks, Particles, Binary data, Inspection, Atomic force microscopy, Extreme ultraviolet

Read Abstract +

Sub-resolution assist features (SRAFs) damage-free cleaning by use of megasonic nozzle becomes main challenge in photomask industry. Using non-sulfate cleaning tool, the effect of key performance parameters of 1 MHz puddle megasonic nozzle such as megasonic power, and the gap between puddle nozzle and cleaned surface were investigated for opaque SRAFs sizes of 107 nm, 93 nm, 81nm, 71 nm, 63 nm, and 56 nm. Damage-free and high efficiency on particle removal cleaning for SRAFs size down to 71 nm for 38 nm technology node (MPU/ASIC 1/2 pitch, as outlined in ITRS 2010) has been demonstrated on advanced photomask with MoSi layer in this paper. Furthermore, conducting atomic force microscopy (CAFM) was employed to investigate the nanoscale surface electrical properties of chrome binary blanks cleaned by 1 MHz puddle megasonic nozzle. The results show that highly conducting regions on chromium oxide surfaces can be considered as "cavitation-rich and/or cavitation energy-strong" regions. And their sizes range from 15 to 100 nm, which are comparable to the sizes of SRAFs damage. Finally, in the future, CAFM may be a useful tool to inspect intrinsic defects on advanced photomasks at nanoscale, such as EUV blanks.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years