Dr. Mingji Lou Profile

Dr. Mingji Lou

at Canon Nanotechnologies Inc

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Author

Publications (2)

SPIE Journal Paper | 4 January 2022

Overlay models for nanoimprint lithography

Nilabh Roy, Mario Meissl, Takahiro Yoshida, Anshuman Cherala, Xiaoming Lu, Jeff Klein, Mingji Lou, Jin Choi, Hiroyuki Sekiguchi, Takashi Shibayama, Mitsuru Hiura

JM3, Vol. 21, Issue 01, 011004, (January 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.1.011004

KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Overlay metrology, Head, Actuators, Calibration, Distortion, Photomasks, Optical lithography, Error analysis

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Proceedings Article | 1 March 2021 Presentation + Paper

Overlay models for nanoimprint lithography

Nilabh Roy, Mario Meissl, Takahiro Yoshida, Anshuman Cherala, Xiaoming Lu, Jeffrey Klein, Mingji Lou, Jin Choi, Hiroyuki Sekiguchi, Takashi Shibayama, Mitsuru Hiura

Proceedings Volume 11610, 1161006 (2021) https://doi.org/10.1117/12.2584742

KEYWORDS: Nanoimprint lithography, Overlay metrology, Optical alignment, Semiconducting wafers, Photomasks, Wafer testing, Optical lithography, Ultraviolet radiation, Signal processing, Lithography

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