Nawaz N.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 August 2024 Poster + Paper
Proceedings Volume 13093, 130932Z (2024) https://doi.org/10.1117/12.3018622
KEYWORDS: Fabrication, Deep reactive ion etching, Silicon, Spectrographs, Optical lithography, Wafer level optics, Spectral resolution, Optical alignment, Design, Semiconducting wafers

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