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Dr. Nicole Herbots
Emeritus Professor, Material Physics at Arizona State Univ
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Publications (1)
Proceedings Article | 1 October 1990 Paper
Role of point defect diffusion and recombination in low-temperature growth of semiconductor heterostructures using low-energy ion beams
Olivier Vancauwenberghe, Nicole Herbots, Olof Hellman
Proceedings Volume 1285, (1990) https://doi.org/10.1117/12.20805
KEYWORDS: Ions, Ion beams, Semiconductors, Chemical species, Sputter deposition, Silicon, Thin films, Diffusion, Molecular beams, Thin film growth
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