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Dr. Oleg Tazetdinov
at Intel Corp
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Publications (1)
Proceedings Article | 13 June 2022 Presentation
Monte Carlo EUV stochastic simulator (MESS): a chemistry-oriented lithography simulator
Patrick Theofanis, Oleg Tazetdinov
Proceedings Volume PC12051, PC120510I (2022) https://doi.org/10.1117/12.2617292
KEYWORDS: Monte Carlo methods, Extreme ultraviolet, Stochastic processes, Lithography, 3D modeling, Chemistry, Extreme ultraviolet lithography, Scattering, Quenching (fluorescence), Polymers
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