Mr. Pavan Yadav Bashaboina Profile

Pavan Yadav Bashaboina

Staff Research Engineer at IBM India Pvt Ltd

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 20 May 2011 Paper

Efficient method for SRAF rule determination

Ramana Murthy V. Pusuluri, Pavan Bashaboina, James Oberschmidt

Proceedings Volume 8081, 80810T (2011) https://doi.org/10.1117/12.899900

KEYWORDS: SRAF, Electronic design automation, Resolution enhancement technologies, Computer simulations, Current controlled current source

Read Abstract +

Depth of focus has always been of great concern in lightography as a result of processes optimized for specific feature dimensions and pitches. Insertion of sub-resolution assist features (SRAFs) or scatter bars ois a common technique used to equalize DOF through the variety of geometries used in a design. SRAFs can be inserted into the layout by a variety of means ranging from methods based on simple rule-tables to full-fledged layout simulations. Various tools are available from electronic design automation (EDA) vendors that are capable of placing srafs based on elaborate simulations of the design layout, but, a tool that can determine rule-table is not available. Each resolution enhancement technique (RET) engineer has his/her own methodology of extracting rules based on simulation of a large layout with design and sraf rule variations. Significant computational resources are required to carry-out these extensive simulations affecting the time required to formulate the rule table and restricting the variation that can be considered for the simulations. In this paper, we discuss an efficient method which overcomes this problem by searching in the design and dsraf rule domain to obtain a comprehensive set of sraf rules, thereby resulting in a better rule-set by using significantly lesser computational resources.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years