Mr. Penghuang Luo Profile

Penghuang Luo

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Proceedings Article | 13 September 2024 Paper

Parallel measurement system based on PSD

Penghuang Luo, Zai Luo, Bin Shen, Ruibing Sha, Yinghui Wang, Yaru Li, Yinbao Cheng

Proceedings Volume 13178, 131782C (2024) https://doi.org/10.1117/12.3035072

KEYWORDS: Error analysis, Sensors

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In response to the requirements for high-precision measurement of form and position errors, a parallelism error measurement system has been built using position sensitive detectors (PSD), which have the advantages of high accuracy, high sensitivity, fast response, and easy integration with other systems. The system uses laser beams as reference lines and two-dimensional position sensitive detectors as photoelectric conversion devices, Through mobile terminal software, real-time display of the position changes of sampling points relative to the reference line can be achieved, and the shape and position error evaluation results can be quickly output using the least squares method, which is faster and more stable compared to traditional measurement methods. The developed parallelism measurement system has been verified to have reliable and accurate measurement results through PSD accuracy testing, nonlinear compensation, repeatability experiments, and error analysis.

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