Prof. Qiang Wu Profile

Prof. Qiang Wu

at Fudan Univ

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Author

Publications (3)

Proceedings Article | 27 April 2023 Poster + Paper

A study of diffraction-based overlay (DBO) on a 3nm CFET metal layer

Yanli Li, Yayi Wei, Qiang Wu, Xianhe Liu, Qi Wang

Proceedings Volume 12496, 124962Y (2023) https://doi.org/10.1117/12.2658167

KEYWORDS: Diffraction, Metals, Tin, Film thickness, Chemical mechanical planarization, Back end of line, Simulations, Spin on carbon materials, Overlay metrology, Signal intensity

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Proceedings Article | 27 April 2023 Poster + Paper

A study of 3nm CFET middle-of-the-line contact layer OCD measurement sensitivity

Xianhe Liu, Qiang Wu, Qi Wang, Yanli Li

Proceedings Volume 12496, 124962Z (2023) https://doi.org/10.1117/12.2658174

KEYWORDS: Scatterometry, Critical dimension metrology, Scattering, Metrology, Light sources and illumination, Design rules, 3D modeling, Optical lithography, Nanosheets, Modeling

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Proceedings Article | 27 April 2023 Poster + Paper

An optical critical dimension (OCD) model analysis on 3nm complementary FET (CFET) gate stacks

Qi Wang, Yayi Wei, Qiang Wu, Yanli Li, Xianhe Liu

Proceedings Volume 12496, 124962Q (2023) https://doi.org/10.1117/12.2657944

KEYWORDS: Scatterometry, Spectroscopy, Optics manufacturing, Modeling, Metrology

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